Solar Cell Business
PECVD
Wafer
- Wafer Size 182 ~ 220mm
Tube
- Tube Quantity Max 6 Tube
Capacity
- Wafer loading/Tube 760 wafer/tube
Process Gas
- Nitride (Front/Back) N2, SiH4, NH3, N2O
Wafer & Boat Loading
- Boat loading Soft Landing Type
- Paddle SiC Paddle
Heater
- Flat zone length ≥2800mm
- Temp range 200 ~ 500°C
H/W Performance
- Temp stability ≤±0.5°C
- Wafer breakage ≤0.01%
Process Performance
- SiN Thickness Uniformity ≤±5%
- Refractive index ≤±1.5%
Customer
- Partner LG Solar, KIER, GCL, Hanwha Q-CELL, JA Solar