HISTORY
Semiconductor & Solar
Furnace Global
Leading Company
2023
- Developed Ultra High Temp Furnace for SiC Wafer Process
- Developed Ultra High Temp Furnace for SiC
-
Development of PE-CVD Nitride Furnace
Supplied to JA, SPIC, KIER
2022
- Supplied 8" Vertical Furnace to SK Hynix System IC
2021
- Supplied 12" Vertical Furnace to SK Siltron
2020
- Exported 8" Vertical Furnace to China
-
Development of Big Size Wafer LP-CVD
Supplied to LONGi, CHINT, JA Solar, KIER
2019
- Developed 6", 8", and 12" Vertical Furnace Equipment for Semiconductor Manufacturing
- Development of 12" Vertical Furnace Supplied to SK Siltron
2018
- Supplied Solar Cell Mass Production Equipment to LONGi, REC, and JA Solar
- Development of 8" Vertical Furnace Supplied to Hynix System IC China
2017~2020
-
Development of High Productivity LP-CVD
Supplied to LONGi, JA, SPIC, REC
2017
- Fuel Cell H2 Restoration Furnace Supplied to LG Electronics
2016
-
LONGi Development of n-TOPCon Cell Furnace
Supplied to LG Solar (LPCVD, Activation, PECVD) - Graphene CVD Furnace Supplied to LG Electronics
2015
-
Development of I-BC Cell Furnace
Supplied to LG Solar (Control Ox, LPCVD, LP POCL3, Passivation)
2013~2016
- Supplied Solar Cell Manufacturing Furnace Equipment to LG Solar (240 Tubes)
2013
-
Development of N-PERT
Activation Supplied to LG Solar
2012
- Maintenance Service for SK Hynix Semiconductor Furnace Equipment
- Development of 8" High Temp Furnace
- Supplied to Hynix System IC
- Development of 6" High Temp Furnace
- Supplied to VISHAY Taiwan
2010
- First Overseas Export of Solar Equipment (PECVD) to China
-
Development of POCL3 Diffusion
Supplied to DMB, LG Solar - ION Chemical Glass Consolidation Furnace Supplied to Gionix
2008
- Development of 12" Horizontal Furnace
- Supplied to LG Siltron / Supplied to Waferworks
2007
- First Independent Overseas Export of Solar Equipment (B/D, PECVD)
2006
- First Independent Overseas Export of Solar Equipment (B/D, PECVD) to China and Taiwan
- Development of 8" Horizontal Furnace
- Supplied to Zhonghuan Semiconductor, Tianjin, China
2005
- Exclusive Export of Semiconductor Equipment Parts to Samsung Electronics and Hynix
2003
-
Completed Hynix Semiconductor Equipment Relocation Project
(Icheon → Cheongju)
2002~2005
- TEL/KE 6”, 8” Furnace
- Refurbish SK Hynix, Samsung
2002
-
Established P&Tech Co., Ltd.
Registered as an Official Vendor of Hynix Semiconductor