SolarCell
POCL3 Diffusion
Solar Cell Business
POCL3 Diffusion
Wafer
- Wafer Size 182 ~ 220mm
Tube
- Tube Quantity Max 6 Tube
Capacity
- Wafer loading/Tube 2880 wafer/tube
Process Gas
- Nitride (Front/Back) N2, O2, POCL3
Wafer & Boat Loading
- Boat loading Soft Landing Type
- Paddle SiC Paddle
Heater
- Flat zone length ≥2800mm
- Temp range 600 ~ 900°C
H/W Performance
- Temp stability ≤±0.5°C
- Wafer breakage ≤0.01%
Process Performance
- Rs Uniformity ≤±5%
- Rs Range 100~200Ω/sq
Customer
- Partner LG Solar, KIER, GCL