Solar Cell
LP-CVD
LP-CVD Furnace
Wafer
- Wafer Size 182 ~ 220mm
Tube
- Tube Quantity Max 6 Tube
Capacity
- Wafer loading/Tube 2880 wafer/tube
Process Gas
- iPOLY/D-POLY N2, O2, SiH4, PH3
Wafer & Boat Loading
- Boat loading Cantilever Type
- Paddle SiC Paddle
Heater
- Flat zone length ≥2800mm
- Temp range 500 ~ 700°C
H/W Performance
- Temp stability ≤±0.5°C
- Wafer breakage ≤0.01%
Process Performance
- i-POLY Uniformity ≤±5%
- iVOC ≥735mV
Customer
- Partner LONGi Solar, Chint, JA Solar, KIER REC Solar, SPIC Solar, GCL, LG Solar