(주)피앤테크

Semiconductor Furnace Business

Horizontal Furnace

Horizontal

Wafer

  • Wafer Size 4", 6", 8", 12"

System Type

  • Type R&D Mini type / Production type

CAPA

  • Wafer Loading Qty 50~300pcs
    (Customer Order made)

Wafer Loading

  • Boat Loading Cantilever / Soft Landing
  • Automatic Wafer loading & boat loading (Customer option)
  • Boat Loading Speed 50mm~1500mm/min
  • Paddle Mini : Ceramic, Production : SIC
  • Paddle moving AC/DC Motor, LM/Ball Screw
  • Customer VISHAY, WAFERWORKS, SK SILTRON, SILAN AMPHENOL SENSING, KEC, AUK, SEGETRONIX, TGMC, LION

Heater

  • Flat Zone Length 300mm~1500mm
  • Temp Control Zone 3 Zone ~ 5 Zone
  • Temp Accuracy ±≤0.5°C
  • Temp Control PID control

Process kit

  • Process Tube Quartz, SiC
  • Boat Quartz, SiC
  • T/C (Thermocouple) R-Type, B-Type (high temp)

S/W & Controller

  • Main Controller MITSUBISHI PLC
  • Control Monitor 15" Touch monitor
  • Temp Controller YOKOGAWA Temp Controller
  • Host Control MES (M/C ↔ Host P/C)