Semiconductor
High Temp Horizontal
Semiconductor Furnace Business
High Temp Horizontal Furnace
Wafer
- Wafer Size 200mm
System Type
- Type Horizontal Furnace
CAPA
- Wafer Loading Qty 150pcs
Wafer Loading
- Boat Loading Cantilever / Quality of 2-3 Tube
- Automatic Full Automation
- Boat Loading Speed 50mm~1500mm/min
- Paddle SIC Paddle
- Paddle moving AC Motor, LM/Ball Screw
Heater
- Flat Zone Length 1100mm
- Temp Control Zone 5 Zone
- Temp Accuracy ±≤0.5°C
- Max Temp 1300°C
Process kit
- Process Tube SIC Tube
- Boat SiC Boat (6.35mm pitch)
- T/C (Thermocouple) B-Type
S/W & Controller
- Main Controller MITSUBISHI PLC
- Temp Controller YOKOGAWA UT55A
Customer
- Partner SK Hynix System IC