HISTORY
반도체, 태양광
Furnace Global
Leading Company
2023
- Developed ultra high temp Furnace for SiC wafer process
- Developed Ultra High Temp Furnace for SiC
-
Development of PE-CVD Nitride Furnace
Supplied to JA, SPIC, KIER
2022
- SK Hynix System IC 에 8" Vertical Furnace 장비 공급
2021
- SK Siltron 12" Vertical Furnace 장비 공급
2020
- 8" Vertical Furnace 중국 수출
-
Development of Big Size Wafer LP-CVD
Supplied to LONGi, CHINT, JA Solar, KIER
2019
- 반도체 제조용 6" 8" 12" Vertical Furnace 장비 개발
- Development of 12" Vertical Furnace Supplied to SK Siltron
2018
- LONGi, REC, JA Solar에 태양광 양산 장비 공급
- Development of 8" Vertical Furnace Supplied to Hynix System IC China
2017~2020
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Development of High Productivity LP-CVD
Supplied to LONGi, JA, SPIC, REC
2017
- Fuel Cell H2 Restoration Furnace Supplied to LG Electronic
2016
-
LONGi Development of n-TOPCon Cell Furnace
Supplied to LG Solar (LPCVD, Activation, PECVD) - Graphene CVD Furnace Supplied to LG Electronic
2015
-
Development of I-BC Cell Furnace
Supplied to LG Solar (Control Ox, LPCVD, LP POCL3, Passivation)
2013~2016
- LG Solar 에 태양광 셀 제조 Furnace 장비 공급 (240 Tube)
2013
-
Development of N-PERT
Activation Supplied to LG Solar
2012
- SK Hynix 반도체 Furnace 유지 보수
- Development of 8" High Temp Furnace
- Supplied to Hynix System IC
- Development of 6" High Temp Furnace
- Supplied to VISHAY Taiwan
2010
- 태양광 장비(PECVD) 1st overseas export (중국)
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Development of POCL3 Diffusion
Supplied to DMB, LG Solar - ION Chemical Glass Consolidation Furnace Supplied to Gionix
2008
- Development of 12" Horizontal Furnace
- Supplied to LG Siltron / Supplied to Waferworks
2007
- 태양광 장비(B/D, PECVD) 1st overseas 단독 수출
2006
- 중국 대만등 태양광 장비(B/D, PECVD) 1st overseas 단독 수출
- Development of 8" Horizontal Furnace
- Supplied to Zhonghuan Semiconductor Tianjin China
2005
- 삼성전자, 하이닉스 반도체 장비 부품 단독 수출
2003
- Hynix 반도체 이천 > 청주 장비 이설 프로젝트 수행
2002~2005
- TEL/KE 6”, 8” Furnace
- Refurbish SK Hynix, Samsung
2002
- ㈜피엔테크 설립, Hynix 반도체 협력 업체 등록