Semiconductor
Horizontal
Semiconductor Furnace Business
Horizontal Furnace
Wafer
- Wafer Size 4", 6", 8", 12"
System Type
- Type R&D Mini type / Production type
CAPA
- Wafer Loading Qty 50~300pcs
(Customer Order made)
Wafer Loading
- Boat Loading Cantilever / Soft Landing
- Automatic Wafer loading & boat loading (Customer option)
- Boat Loading Speed 50mm~1500mm/min
- Paddle Mini : Ceramic, Production : SIC
- Paddle moving AC/DC Motor, LM/Ball Screw
- Customer VISHAY, WAFERWORKS, SK SILTRON, SILAN AMPHENOL SENSING, KEC, AUK, SEGETRONIX, TGMC, LION
Heater
- Flat Zone Length 300mm~1500mm
- Temp Control Zone 3 Zone ~ 5 Zone
- Temp Accuracy ±≤0.5°C
- Temp Control PID control
Process kit
- Process Tube Quartz, SiC
- Boat Quartz, SiC
- T/C (Thermocouple) R-Type, B-Type (high temp)
S/W & Controller
- Main Controller MITSUBISHI PLC
- Control Monitor 15" Touch monitor
- Temp Controller YOKOGAWA Temp Controller
- Host Control MES (M/C ↔ Host P/C)