Semiconductor
Mini Furnace
Semiconductor Furnace Business
Mini Furnace
Wafer
- Wafer Size 4", 6", 8", 12"
System Type
- Type Horizontal Furnace
CAPA
- Wafer Loading Qty 10~50 EA
Wafer Loading
- Boat Loading Vertical type | Boat elevator
Horizontal type | Cantilever - Wafer Loading Manual Type
- Boat Loading Speed 50mm~1500mm/min
- Paddle moving AC/DC Motor, LM/Ball Screw
Heater
- Temp Range 100~1200°C
Process kit
- AP Furnace Oxidation, Anneal, Drive -In
- LP Furnace Nitride, POLY/D -POLY, TEOS, HTO, LTO
S/W & Controller
- Main Controller MITSUBISHI PLC
- Temp Controller YOKOGAWA UT55A
Customer
- Partner SK Hynix System IC, Segitronix, Amphenole sensing Korea, Korea University, KIER, GIST