P&TECH Co., Ltd.

Semiconductor Furnace Business

Wafer Transfer

Wafer Transfer

Wafer

  • Wafer Size 4", 6", 8", 12"

WPH

  • WPH 25EA, 50EA

Stage

  • Wafer Loading Qty 10~50 EA

Wafer Gripper

  • Type Gripper, Vacuum

Heater

  • Temp Range 100~1200°C

Male Control

  • Control PLC

Monitor

  • Type Touch Monitor
    TGMC