Semiconductor
LP-Anneal
Semiconductor Furnace Business
LP-Anneal
Wafer
- Wafer Size 6", 8"
System Type
- Type Horizontal Furnace
CAPA
- Wafer Loading Qty 150~300pcs
Wafer Loading
- Boat Loading Soft Landing
- Automatic Manual Type
- Boat Loading Speed 50mm~1500mm/min
- Paddle SIC Paddle
- Paddle moving AC Motor, LM/Ball Screw
Heater
- Heater Type RC Heater
- Temp Range 100~500°C
Process kit
- Ultimate Pressure 10-7 Torr
- Vaccum Pump Turbo pump + Dry pump
S/W & Controller
- Main Controller MITSUBISHI PLC
- Temp Controller YOKOGAWA UT55A
Customer
- Partner SK Hynix System IC, Silan, LION